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Chemical and physical aspects of the post-exposure baking process used for positive-tone chemically amplified resists.

William D. HinsbergFrances A. HouleMartha I. SanchezGregory M. Wallraff
Published in: IBM J. Res. Dev. (2001)
Keyphrases
  • data sets
  • e learning
  • computer vision
  • positive and negative
  • machine learning
  • learning algorithm
  • decision making
  • metadata
  • image processing
  • virtual environment
  • electron beam