Frances A. Houle

Publication Activity (10 Years)

Years Active: 2001-2001
Publications (10 Years): 0

Publications

William D. Hinsberg, Frances A. Houle, Martha I. Sanchez, Gregory M. Wallraff
Chemical and physical aspects of the post-exposure baking process used for positive-tone chemically amplified resists. IBM J. Res. Dev. 45 (5) (2001)