Computer Simulation of Electron-Beam Resist Profiles.

D. F. Kyser R. Pyle

Published in: IBM J. Res. Dev. (1980)

Keyphrases

electron beam
computer simulation
integrated circuit
x ray
design parameters
semiconductor devices
user profiles
cognitive processing
artificial intelligence
electron beam lithography
neural network
multispectral
bit error rate
exploratory learning
land cover change