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Photoelectroscopic Study of Mn Barrier Layer on SiO2 for Si Wafer Bonding Process.

Takahiro NagataKazumichi TsumuraKenro NakamuraKengo UchidaJin KawakitaToyohiro ChikyowKazuyuki Higashi
Published in: 3DIC (2019)
Keyphrases
  • database
  • multiscale
  • neural network
  • empirical studies
  • data sets
  • feature selection
  • simulation study
  • manufacturing process
  • metal oxide