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Kenro Nakamura
Publication Activity (10 Years)
Years Active: 2019-2019
Publications (10 Years): 1
Top Topics
Multiscale
Manufacturing Process
Simulation Study
Metal Oxide
Top Venues
3DIC
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Publications
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Takahiro Nagata
,
Kazumichi Tsumura
,
Kenro Nakamura
,
Kengo Uchida
,
Jin Kawakita
,
Toyohiro Chikyow
,
Kazuyuki Higashi
Photoelectroscopic Study of Mn Barrier Layer on SiO2 for Si Wafer Bonding Process.
3DIC
(2019)