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Local damage free Si substrate ultra thinning for backside emission spectral analysis using OBPF for LSI failure mode detection.

Takuya NaoeTamao IkeuchiChie MoritniHirohiko EndohKohichi Yokoyama
Published in: Microelectron. Reliab. (2013)
Keyphrases
  • spectral analysis
  • failure modes
  • high speed
  • spectral methods
  • latent semantic indexing
  • autoregressive
  • information retrieval
  • multiresolution
  • non stationary
  • spectral features
  • filter bank
  • fault tree