Micro-/Nano-Integration for MEMS based on nano-robotic assembly.

Thomas Wich Manuel Mikczinski Sergej Fatikow

Published in: ISR/ROBOTIK (2010)

Keyphrases

nano scale
electron microscopy
robotic tasks
atomic force microscopy
real time
high level
databases
genetic algorithm
image processing
mobile robot
x ray
business processes
tactile sensing