Wafer Type Ion Energy Monitoring Sensor for Plasma Diagnosis.
Chansu HanYoonsung KooJaehwan KimKwangwook ChoiSangjeen HongPublished in: Sensors (2023)
Keyphrases
- high energy
- real time
- scanning electron microscope
- critical care
- monitoring system
- sensor data
- sensor networks
- integrated circuit
- neural network
- low energy
- energy minimization
- data acquisition
- decision support
- medical diagnosis
- model based diagnosis
- energy saving
- sensor fusion
- energy consumption
- failure detection
- fault detection and diagnosis
- automatic diagnosis
- industrial systems
- acoustic emission
- fault diagnosis