Micro-Raman spectroscopy measurement of stress in silicon.

Xiaoming Wu Jianyuan Yu Tianling Ren Litian Liu

Published in: Microelectron. J. (2007)

Keyphrases

raman spectra
x ray
infrared
multi component
low cost
high speed
probabilistic neural networks
data acquisition
transmission electron microscopy
database
real time
decision trees
markov chain
electron microscopy
plasma etching
electro mechanical systems