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The effects of etching and deposition on the performance and stress evolution of open through silicon vias.
Lado Filipovic
Siegfried Selberherr
Published in:
Microelectron. Reliab. (2014)
Keyphrases
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plasma etching
high density
thin film
low density
field effect transistors
integrated circuit
magnetic recording
chemical vapor deposition
data center
database
three dimensional
neural network
room temperature