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Simulating fast electron beam melting with a parallel thermal free surface lattice Boltzmann method.
Regina Ammer
Matthias Markl
Ulric Ljungblad
Carolin Körner
Ulrich Rüde
Published in:
Comput. Math. Appl. (2014)
Keyphrases
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electron beam
lattice boltzmann method
integrated circuit
x ray
level set
three dimensional
semiconductor devices
design parameters
vector field
electron beam lithography