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Fabrication of silicon piezoresistive pressure sensor using a reliable wet etching process.
Huiming Xu
Hong Zhang
Zhiqiang Deng
Haisheng San
Yuxi Yu
Published in:
NEMS (2013)
Keyphrases
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high density
integrated circuit
database
neural network
evolutionary algorithm
sensor networks
high speed
cost effective
multi sensor
data mining
information retrieval
process model
magnetic recording
plasma etching