Translation-Invariant Multiscale Energy-Based PCA for Monitoring Batch Processes in Semiconductor Manufacturing.
Tiago J. RatoJakey BlueJacques PinatonMarco S. ReisPublished in: IEEE Trans Autom. Sci. Eng. (2017)
Keyphrases
- translation invariant
- semiconductor manufacturing
- multiscale
- wavelet transform
- principal component analysis
- denoising
- process control
- mathematical morphology
- contourlet transform
- object identification
- morphological operators
- wavelet packet
- edge detection
- scale space
- image processing
- wavelet coefficients
- real time
- feature extraction
- feature space
- image representation
- dimensionality reduction
- face recognition
- shift invariant
- morphological filters
- natural images
- image segmentation
- morphological operations
- production system
- feature vectors
- high dimensional
- structuring elements
- multiresolution
- image denoising
- texture features
- high frequency
- image quality