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Stitch-Aware Routing Considering Smart Boundary for Multiple E-Beam Lithography.

Chih-Hsiang HsuShao-Yun Fang
Published in: VLSI-DAT (2020)
Keyphrases
  • electron beam
  • database
  • genetic algorithm
  • field of view
  • electron beam lithography
  • computer vision
  • shortest path