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Automatic Identification of Yield Limiting Layout Patterns Using Root Cause Deconvolution on Volume Scan Diagnosis Data.

Wu-Tung ChengRandy KlingenbergBrady BenwareWu YangManish SharmaGeir EideYue TianSudhakar M. ReddyYan PanSherwin FernandesAtul Chittora
Published in: ATS (2017)
Keyphrases
  • root cause
  • automatic identification
  • data sets
  • data sources
  • knowledge discovery
  • interesting patterns
  • high quality
  • data analysis
  • data mining techniques
  • data mining