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An Application of White Light Interferometry in Thin Film Measurements.
C. Lin
R. F. Sullivan
Published in:
IBM J. Res. Dev. (1972)
Keyphrases
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white light interferometry
thin film
high density
short circuit
solar cell
grain size
electron microscopy
film thickness
databases
neural network
learning algorithm
three dimensional
sensor networks
multi layer
time of flight
room temperature