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Lithography Defect Probability and Its Application to Physical Design Optimization.

Seongbo ShimWoohyun ChungYoungsoo Shin
Published in: IEEE Trans. Very Large Scale Integr. Syst. (2017)
Keyphrases
  • evolutionary algorithm
  • probability distribution
  • probability theory
  • real world
  • reinforcement learning
  • computer vision
  • website
  • database systems
  • expert systems
  • pairwise
  • electron beam