Films Prepared by Magnetron Sputtering.

Wenjie Sheng Xiao Yang Cong Wang Yong Zhang

Published in: Entropy (2016)

Keyphrases

film thickness
magnetic field
rf sputtering
grain size
thin film
electrical properties
high quality
film restoration
real time
decision making
expert systems
image analysis
high speed
refractive index
electron micrographs