Design of virtual production lines in back-end semiconductor manufacturing systems.

Ying Tang MengChu Zhou Robin G. Qiu

Published in: SMC (2000)

Keyphrases

manufacturing systems
back end
production line
assembly line
detailed design
holonic manufacturing systems
design process
building blocks
data management
manufacturing environment
production process
manufacturing process
database systems
petri net
data types
user friendly
quality control
data model
real time