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Modeling and Control of a Six-Axis Parallel Piezo-Flexural Micropositioning Stage With Cross-Coupling Hysteresis Nonlinearities.
Shengzheng Kang
Hongtao Wu
Shengdong Yu
Yao Li
Xiaolong Yang
Jiafeng Yao
Published in:
AIM (2020)
Keyphrases
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axis parallel
data sets
neural network
supervised learning