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A Line Extraction Method for Automated SEM Inspection of VLSI Resist.

David B. ShuChing-Chung LiJ. F. MancusoYung-Nien Sun
Published in: IEEE Trans. Pattern Anal. Mach. Intell. (1988)
Keyphrases
  • semi automated
  • fully automated
  • high speed
  • computer aided
  • vlsi design
  • line segments
  • visual inspection
  • automated analysis
  • artificial intelligence
  • data driven
  • quality control