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Neural-Network-Based Sensor Fusion of Optical Emission and Mass Spectroscopy Data for Real-Time Fault Detection in Reactive Ion Etching.
Sang Jeen Hong
Gary S. May
Published in:
IEEE Trans. Ind. Electron. (2005)
Keyphrases
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real time
sensor fusion
fault detection
data analysis
data sources
image processing
sensor data
multiple sensors
industrial processes
computer vision
control system
infrared
fault diagnosis