Parylene-C Coating on High Resolution MEMS Tactile Sensor for Protection of Measurement Surface.
Yuki SakakiharaKazuki WatataniKyohei TeraoFusao ShimokawaHidekuni TakaoPublished in: IEEE SENSORS (2019)
Keyphrases
- high resolution
- laser scanner
- low resolution
- super resolution
- point cloud
- imaging sensors
- remote sensing
- sensor networks
- data acquisition
- high resolution images
- sensor data
- high frequency
- image processing
- highest resolution
- surface reconstruction
- range data
- three dimensional
- high quality
- d objects
- multi sensor
- stereo camera
- real time
- privacy protection
- time of flight
- information security
- laser scanning
- surface orientation
- sonar images
- protection scheme
- range sensors
- data protection
- surface model
- control system
- magnetic resonance images
- face images
- field of view