Login / Signup
Properties of ZnO/Cu/ZnO multilayer films deposited by simultaneous RF and DC magnetron sputtering at different substrate temperatures.
Daya Ram Sahu
Jow-Lay Huang
Published in:
Microelectron. J. (2007)
Keyphrases
</>
rf sputtering
magnetic field
thin film
film thickness
silicon nitride
electron microscopy
high density
multi layer
desirable properties
room temperature
structural properties
information retrieval
low cost
three dimensional
database
mechanical properties
thermal conductivity
search engine