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Fault Diagnosis of MEMS Lateral Comb Resonators Using Multiple-Model Adaptive Estimators.

Afshin IzadianParviz Famouri
Published in: IEEE Trans. Control. Syst. Technol. (2010)
Keyphrases
  • fault diagnosis
  • bp neural network
  • fault detection
  • real time
  • knowledge base
  • expert systems
  • mathematical model
  • data fusion
  • chemical process