CAD-Driven High-Precision E-Beam Positioning.

Kent Kwang Hsin Wang Arthur Hu Mitsuyuki Asaki Hironobu Niijima

Published in: ITC (1993)

Keyphrases

high precision
high recall
data driven
high reliability
achieve high precision
computer aided
computer aided design
data sets
learning algorithm
social networks
information systems
knowledge base
image analysis
object oriented
precision and recall
electron beam