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In-Situ Semiconductor Position Sensor for Differentially Piezo-Driven Nanopositioners.
Ali Bazaei
Mokrane Boudaoud
Massoud Hemmasian Ettefagh
Zhiyong Chen
Stephane Régnier
Published in:
IEEE SENSORS (2019)
Keyphrases
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sensor data
data driven
sensor networks
robot moves
real time
image sequences
computer vision
mobile robot
search engine
sensor fusion
position information
case study
learning algorithm
information retrieval
multi sensor
sensory data
semiconductor manufacturing
sensor array
neural network