Provably Good Max-Min-m-neighbor-TSP-Based Subfield Scheduling for Electron-Beam Photomask Fabrication.
Zhi-Wen LinShao-Yun FangYao-Wen ChangWei-Cheng RaoChieh-Hsiung KuanPublished in: ICCAD (2015)
Keyphrases
- electron beam
- max min
- integrated circuit
- x ray
- min max
- traveling salesman problem
- semiconductor devices
- scheduling problem
- design parameters
- resource allocation
- genetic algorithm
- hill climbing
- ant colony optimization
- combinatorial optimization
- np hard
- search space
- robust optimization
- fuzzy relation equations
- optimal solution
- objective function