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Application of Principal Components Analysis to improve fault detection and diagnosis on semiconductor manufacturing equipment.
Alexis Thieullen
Mustapha Ouladsine
Jacques Pinaton
Published in:
ECC (2013)
Keyphrases
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principal components analysis
semiconductor manufacturing
fault detection and diagnosis
fault detection
process control
neural network
artificial intelligence
pattern recognition
high dimensional
dimensionality reduction
production system
covariance matrix