Design and fabrication of silicon-based 8×8 MEMS optical switch array.

Cuiping Jia Jingran Zhou Wei Dong Weiyou Chen

Published in: Microelectron. J. (2009)

Keyphrases

high speed
high density
design process
focal plane
design considerations
real time
genetic algorithm
artificial intelligence
expert systems
high resolution
control system
object oriented
design decisions
design methodology
functional verification
charge coupled device