Fuzzy logic in a blackboard system for controlling plasma deposition processes.
Adrian A. HopgoodHeather J. PhillipsPhil D. PictonNicholas St. J. BraithwaitePublished in: Artif. Intell. Eng. (1998)
Keyphrases
- fuzzy logic
- thin film
- plasma etching
- chemical vapor deposition
- expert systems
- neural network
- soft computing
- intelligent control
- control system
- computational intelligence
- fuzzy sets
- process model
- decision making
- genetic algorithm
- fuzzy reasoning
- fuzzy set theory
- fuzzy membership functions
- fuzzy rules
- evolutionary computation
- membership functions
- machine learning
- high density
- stochastic processes
- knowledge based systems
- domain knowledge
- blackboard architecture
- case study