Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation.

Shuichi Nagasawa Masamitsu Tanaka Naoki Takeuchi Yuki Yamanashi Shigeyuki Miyajima Fumihiro China Taiki Yamae Koki Yamazaki Yuta Somei Naonori Sega Yoshinao Mizugaki Hiroaki Myoren Hirotaka Terai Mutsuo Hidaka Nobuyuki Yoshikawa Akira Fujimaki

Published in: IEICE Trans. Electron. (2021)

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