Mechanical Behavior Of Nano Scale Thin Films Using Mems Sensors.

Taher Saif Aman Haque

Published in: Int. J. Comput. Eng. Sci. (2003)

Keyphrases

thin film
nano scale
grain size
high density
short circuit
databases
multi layer
sensor networks
multi sensor
cost effective
data fusion
sensor data
solar cell
film thickness
chemical vapor deposition
machine learning
real time
force sensing
selective perception