A fast manufacturability aware Optical Proximity Correction (OPC) algorithm with adaptive wafer image estimation.
Ahmed AwadAtsushi TakahashiChikaaki KodamaPublished in: DATE (2016)
Keyphrases
- estimation algorithm
- region of interest
- segmentation algorithm
- detection algorithm
- similarity measure
- image classification
- segmentation method
- test images
- single image
- computational complexity
- learning algorithm
- image data
- optimal solution
- image processing algorithms
- spatially adaptive
- expectation maximization
- energy function
- image segmentation
- medical images
- maximum likelihood estimator
- multiscale
- gray value
- k means
- distance transform
- maximum a posteriori probability
- adaptive threshold
- gradient information
- objective function
- parameter estimation
- image set
- image features
- input image
- matching algorithm
- edge detection
- binary images
- feature points