Feature Vectors Based on Wire Width and Distance for Lithography Hotspot Detection.
Gaku KataokaMasahiro YamamotoMasato InagiShinobu NagayamaShin'ichi WakabayashiPublished in: IPSJ Trans. Syst. LSI Des. Methodol. (2023)
Keyphrases
- feature vectors
- euclidean distance
- object detection
- detection algorithm
- kullback leibler distance
- distance function
- anomaly detection
- distance measure
- detection scheme
- three dimensional
- automatic detection
- detection accuracy
- false alarms
- feature space
- similarity measure
- minimum distance
- real time
- computer vision
- early warning
- rotation invariant
- distance transform
- image processing
- detection method
- feature extraction
- support vector machine