Rounding of Negative Dry Film Resist by Diffusive Backside Exposure Creating Rounded Channels for Pneumatic Membrane Valves.
Philipp FrankSebastian HaefnerGeorgi PaschewAndreas RichterPublished in: Micromachines (2015)
Keyphrases
- magnetic recording
- electron beam lithography
- linear programming
- approximation algorithms
- degrees of freedom
- floating point
- image filtering
- positive and negative
- multi channel
- film restoration
- communication channels
- force control
- electron beam
- robot arm
- linear programming relaxation
- real time
- control system
- video sequences
- optimal solution