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Sebastian Haefner
Publication Activity (10 Years)
Years Active: 2015-2015
Publications (10 Years): 0
Top Topics
Linear Programming Relaxation
Electron Beam Lithography
Film Restoration
Force Control
Top Venues
Micromachines
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Publications
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Philipp Frank
,
Sebastian Haefner
,
Georgi Paschew
,
Andreas Richter
Rounding of Negative Dry Film Resist by Diffusive Backside Exposure Creating Rounded Channels for Pneumatic Membrane Valves.
Micromachines
6 (11) (2015)