Fabrication technique of a 3 dimensional SU8 mold on PMMA substrate.

Irni Hamiza Hamzah Asrulnizam Bin Abd Manaf Othman Sidek

Published in: IEICE Electron. Express (2009)

Keyphrases

electron beam
semiconductor devices
x ray
integrated circuit
design parameters
multi dimensional
database
data mining
three dimensional
electron beam lithography
real world
case study
multiresolution
dimensional data