Detection of failure sites by focused ion beam and nano-probing in the interconnect of three-dimensional stacked circuit structures.
Yu YangHugo BenderKai ArstilaBart SwinnenBert VerlindenIngrid De WolfPublished in: Microelectron. Reliab. (2008)
Keyphrases
- three dimensional
- high speed
- detection algorithm
- internal structures
- automatic detection
- website
- object detection
- false positives
- anomaly detection
- detection accuracy
- detection rate
- real time
- d objects
- image sequences
- computer vision
- human body
- analog vlsi
- power dissipation
- high density
- nano scale
- false alarms
- surface reconstruction
- range images
- multi view
- neural network