Guidelines for intermediate back end of line (BEOL) for 3D sequential integration.
Claire Fenouillet-BérangerS. BeaurepaireFabien DepratAlexandre Ayres De SousaLaurent BrunetPerrine BatudeOlivier RozeauFrançois AndrieuPaul BesombesM.-P. SamsonBernard PrevitaliF. NemouchiG. RodriguezPhilippe RodriguezR. FamulokNils RambalV. BalanZ. SaghiV. JousseaumeCharles-Antoine GuérinF. IbarsF. ProudD. NouguierDavid NeyV. DelayeH. DansasX. FederspielMaud VinetPublished in: ESSDERC (2017)