Vapor-Phase Polishing of Silicon with H2-HBr Gas Mixtures.

Lawrence V. Gregor Pieter Balk Frank J. Campagna

Published in: IBM J. Res. Dev. (1965)

Keyphrases

genetic algorithm
high speed
genetic search
multiscale
low cost
mixtures of gaussians
neural network
preprocessing phase
source separation
heavy tailed
phase unwrapping
learning phase
blind source separation
diffusion process
high density
parametric models
maximum likelihood