Login / Signup
Frank J. Campagna
Publication Activity (10 Years)
Years Active: 1965-1965
Publications (10 Years): 0
</>
Publications
</>
Lawrence V. Gregor
,
Pieter Balk
,
Frank J. Campagna
Vapor-Phase Polishing of Silicon with H2-HBr Gas Mixtures.
IBM J. Res. Dev.
9 (4) (1965)