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Equipment deterioration modeling and cause diagnosis in semiconductor manufacturing.
Hamideh Rostami
Jakey Blue
Argon Chen
Claude Yugma
Published in:
Int. J. Intell. Syst. (2021)
Keyphrases
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semiconductor manufacturing
discrete event simulation
expert systems
process control
multi agent systems
neural network
learning algorithm
e learning
case study
multiscale
fault diagnosis
model based diagnosis