Feedback control of growth rate and surface roughness in thin film growth.
Yiming LouPanagiotis D. ChristofidesPublished in: CDC (2003)
Keyphrases
- growth rate
- feedback control
- thin film
- surface roughness
- closed loop
- adaptive control
- optimal control
- high density
- specular reflection
- multi layer
- curved surfaces
- solar cell
- economic development
- manufacturing process
- fuzzy inference system
- real time
- highly correlated
- control method
- neural network
- software engineering
- data mining