Epitaxial growth of non-cubic silicon.

Andreas Fissel C. Wang E. Bugiel H. Jörg Osten

Published in: Microelectron. J. (2005)

Keyphrases

chemical vapor deposition
thin film
electrical properties
high density
high speed
b spline
growth rate
low cost
steady state
neural network
information technology
artificial neural networks
supply chain
growth model