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Epitaxial growth of non-cubic silicon.
Andreas Fissel
C. Wang
E. Bugiel
H. Jörg Osten
Published in:
Microelectron. J. (2005)
Keyphrases
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chemical vapor deposition
thin film
electrical properties
high density
high speed
b spline
growth rate
low cost
steady state
neural network
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artificial neural networks
supply chain
growth model