Liquid Density Sensing Using Resonant Flexural Plate Wave Device with Sol-Gel PZT Thin Films
Jyh-Cheng YuHuang-Yao LinPublished in: CoRR (2008)
Keyphrases
- thin film
- wave propagation
- high density
- low density
- sensing devices
- data acquisition
- sensor networks
- short circuit
- grain size
- multi layer
- solar cell
- white light interferometry
- neural network
- chemical vapor deposition
- frequency band
- artificial neural networks
- finite element model
- film thickness
- cost effective
- databases