Morphological and electrical comparison of Ti and Ta based ohmic contacts for AlGaN/GaN-on-SiC HFETs.

Alexander Pooth Johan Bergsten Niklas Rorsman Hassan Hirshy R. Perks Paul J. Tasker Trevor Martin Richard F. Webster Dave Cherns Michael J. Uren Martin Kuball

Published in: Microelectron. Reliab. (2017)

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