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Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array.

Hong Goo YeoJoontaek JungMinkyung SimJae Eun JangHongsoo Choi
Published in: Sensors (2020)
Keyphrases
  • thin film
  • sensor array
  • multi layer
  • short circuit
  • high density
  • line fitting
  • solar cell
  • signal subspace
  • room temperature
  • neural network
  • denoising
  • white light interferometry