Deep Learning based Defect classification and detection in SEM images: A Mask R-CNN approach.
Bappaditya DeyEnrique DehaerneKasem KhalilSandip HalderPhilippe LerayMagdy A. BayoumiPublished in: CoRR (2022)
Keyphrases
- deep learning
- image database
- bounding box
- input image
- object recognition
- test images
- defect classification
- image classification
- image features
- segmentation algorithm
- image retrieval
- segmentation method
- viewpoint
- object detection
- machine learning
- unsupervised learning
- k means
- multiple images
- target object
- feature extraction