A silicon micromachined flow sensor using thermopiles for heat transfer measurements.
Seiji OdaMitsuyoshi AnzaiShoichi UematsuKenzo WatanabePublished in: IEEE Trans. Instrum. Meas. (2003)
Keyphrases
- heat transfer
- fluid flow
- flow rate
- computational fluid dynamics
- sensor measurements
- water flow
- numerical simulations
- sensor data
- heat exchanger
- sensor networks
- time of flight
- natural gas
- thermal conductivity
- temperature field
- finite element method
- high density
- multi sensor
- high speed
- dynamical systems
- fault diagnosis
- artificial intelligence
- power plant
- mathematical models
- flow field
- charge coupled device